7/10/2012	12:07:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/10/2012	12:08:05 AM	Recipe started at 12:07 AM
7/10/2012	12:08:05 AM	Helium valve closed
7/10/2012	12:08:05 AM	H2 valve closed
7/10/2012	12:08:05 AM	BCl3 valve closed
7/10/2012	12:08:05 AM	PH3 valve closed
7/10/2012	12:08:05 AM	SiCl4 pre valve closed
7/10/2012	12:08:05 AM	SiCl4 post valve closed
7/10/2012	12:08:05 AM	Main Vac valve closed
7/10/2012	12:08:05 AM	Bubbler valve closed
7/10/2012	12:08:05 AM	Bypass valve opened
7/10/2012	12:08:05 AM	Helium MFC set to  0.000000
7/10/2012	12:08:05 AM	H2 MFC set to  0.000000
7/10/2012	12:08:05 AM	BCl3 MFC set to  0.000000
7/10/2012	12:08:05 AM	PH3 MFC set to  0.000000
7/10/2012	12:08:05 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:08:05 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:08:05 AM	Tube furnace set to 0
7/10/2012	12:08:05 AM	Helium valve closed
7/10/2012	12:08:05 AM	H2 valve closed
7/10/2012	12:08:05 AM	BCl3 valve closed
7/10/2012	12:08:05 AM	PH3 valve closed
7/10/2012	12:08:05 AM	SiCl4 pre valve closed
7/10/2012	12:08:05 AM	SiCl4 post valve closed
7/10/2012	12:08:05 AM	Main Vac valve closed
7/10/2012	12:08:05 AM	Bubbler valve closed
7/10/2012	12:08:05 AM	Bypass valve opened
7/10/2012	12:08:05 AM	Helium MFC set to  0.000000
7/10/2012	12:08:05 AM	H2 MFC set to  0.000000
7/10/2012	12:08:05 AM	BCl3 MFC set to  0.000000
7/10/2012	12:08:05 AM	PH3 MFC set to  0.000000
7/10/2012	12:08:05 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:08:05 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:08:05 AM	Tube furnace set to 0
7/10/2012	12:08:35 AM	Helium valve closed
7/10/2012	12:08:35 AM	H2 valve closed
7/10/2012	12:08:35 AM	BCl3 valve closed
7/10/2012	12:08:35 AM	PH3 valve closed
7/10/2012	12:08:35 AM	SiCl4 pre valve closed
7/10/2012	12:08:35 AM	SiCl4 post valve closed
7/10/2012	12:08:35 AM	Bypass valve closed
7/10/2012	12:08:35 AM	Bubbler valve closed
7/10/2012	12:08:35 AM	Main Vac valve opened
7/10/2012	12:08:35 AM	Helium MFC set to  0.000000
7/10/2012	12:08:35 AM	H2 MFC set to  0.000000
7/10/2012	12:08:35 AM	BCl3 MFC set to  0.000000
7/10/2012	12:08:35 AM	PH3 MFC set to  0.000000
7/10/2012	12:08:35 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:08:35 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:08:36 AM	Tube furnace set to 0
7/10/2012	12:09:06 AM	H2 valve closed
7/10/2012	12:09:06 AM	BCl3 valve closed
7/10/2012	12:09:06 AM	PH3 valve closed
7/10/2012	12:09:06 AM	SiCl4 pre valve closed
7/10/2012	12:09:06 AM	SiCl4 post valve closed
7/10/2012	12:09:06 AM	Bypass valve closed
7/10/2012	12:09:06 AM	Bubbler valve closed
7/10/2012	12:09:06 AM	Helium valve opened
7/10/2012	12:09:06 AM	Main Vac valve opened
7/10/2012	12:09:06 AM	Helium MFC set to  20.000000
7/10/2012	12:09:06 AM	H2 MFC set to  0.000000
7/10/2012	12:09:06 AM	BCl3 MFC set to  0.000000
7/10/2012	12:09:06 AM	PH3 MFC set to  0.000000
7/10/2012	12:09:06 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:09:06 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:09:06 AM	Tube furnace set to 0
7/10/2012	12:09:36 AM	Helium valve closed
7/10/2012	12:09:36 AM	H2 valve closed
7/10/2012	12:09:36 AM	BCl3 valve closed
7/10/2012	12:09:36 AM	PH3 valve closed
7/10/2012	12:09:36 AM	SiCl4 pre valve closed
7/10/2012	12:09:36 AM	SiCl4 post valve closed
7/10/2012	12:09:36 AM	Bypass valve closed
7/10/2012	12:09:36 AM	Bubbler valve closed
7/10/2012	12:09:36 AM	Main Vac valve opened
7/10/2012	12:09:36 AM	Helium MFC set to  0.000000
7/10/2012	12:09:36 AM	H2 MFC set to  0.000000
7/10/2012	12:09:36 AM	BCl3 MFC set to  0.000000
7/10/2012	12:09:36 AM	PH3 MFC set to  0.000000
7/10/2012	12:09:36 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:09:36 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:09:36 AM	Tube furnace set to 0
7/10/2012	12:10:06 AM	H2 valve closed
7/10/2012	12:10:06 AM	BCl3 valve closed
7/10/2012	12:10:06 AM	PH3 valve closed
7/10/2012	12:10:06 AM	SiCl4 pre valve closed
7/10/2012	12:10:06 AM	SiCl4 post valve closed
7/10/2012	12:10:06 AM	Bypass valve closed
7/10/2012	12:10:06 AM	Bubbler valve closed
7/10/2012	12:10:06 AM	Helium valve opened
7/10/2012	12:10:06 AM	Main Vac valve opened
7/10/2012	12:10:06 AM	Helium MFC set to  20.000000
7/10/2012	12:10:06 AM	H2 MFC set to  0.000000
7/10/2012	12:10:06 AM	BCl3 MFC set to  0.000000
7/10/2012	12:10:06 AM	PH3 MFC set to  0.000000
7/10/2012	12:10:06 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:10:06 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:10:06 AM	Tube furnace set to 0
7/10/2012	12:10:36 AM	Helium valve closed
7/10/2012	12:10:36 AM	H2 valve closed
7/10/2012	12:10:36 AM	BCl3 valve closed
7/10/2012	12:10:36 AM	PH3 valve closed
7/10/2012	12:10:36 AM	SiCl4 pre valve closed
7/10/2012	12:10:36 AM	SiCl4 post valve closed
7/10/2012	12:10:36 AM	Bypass valve closed
7/10/2012	12:10:36 AM	Bubbler valve closed
7/10/2012	12:10:36 AM	Main Vac valve opened
7/10/2012	12:10:36 AM	Helium MFC set to  0.000000
7/10/2012	12:10:36 AM	H2 MFC set to  0.000000
7/10/2012	12:10:36 AM	BCl3 MFC set to  0.000000
7/10/2012	12:10:36 AM	PH3 MFC set to  0.000000
7/10/2012	12:10:36 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:10:36 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:10:36 AM	Tube furnace set to 0
7/10/2012	12:11:07 AM	H2 valve closed
7/10/2012	12:11:07 AM	BCl3 valve closed
7/10/2012	12:11:07 AM	PH3 valve closed
7/10/2012	12:11:07 AM	SiCl4 pre valve closed
7/10/2012	12:11:07 AM	SiCl4 post valve closed
7/10/2012	12:11:07 AM	Bypass valve closed
7/10/2012	12:11:07 AM	Bubbler valve closed
7/10/2012	12:11:07 AM	Helium valve opened
7/10/2012	12:11:07 AM	Main Vac valve opened
7/10/2012	12:11:07 AM	Helium MFC set to  20.000000
7/10/2012	12:11:07 AM	H2 MFC set to  0.000000
7/10/2012	12:11:07 AM	BCl3 MFC set to  0.000000
7/10/2012	12:11:07 AM	PH3 MFC set to  0.000000
7/10/2012	12:11:07 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:11:07 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:11:07 AM	Tube furnace set to 0
7/10/2012	12:11:37 AM	Helium valve closed
7/10/2012	12:11:37 AM	H2 valve closed
7/10/2012	12:11:37 AM	BCl3 valve closed
7/10/2012	12:11:37 AM	PH3 valve closed
7/10/2012	12:11:37 AM	SiCl4 pre valve closed
7/10/2012	12:11:37 AM	SiCl4 post valve closed
7/10/2012	12:11:37 AM	Bypass valve closed
7/10/2012	12:11:37 AM	Bubbler valve closed
7/10/2012	12:11:37 AM	Main Vac valve opened
7/10/2012	12:11:37 AM	Helium MFC set to  0.000000
7/10/2012	12:11:37 AM	H2 MFC set to  0.000000
7/10/2012	12:11:37 AM	BCl3 MFC set to  0.000000
7/10/2012	12:11:37 AM	PH3 MFC set to  0.000000
7/10/2012	12:11:37 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:11:37 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:11:37 AM	Tube furnace set to 0
7/10/2012	12:12:07 AM	H2 valve closed
7/10/2012	12:12:07 AM	BCl3 valve closed
7/10/2012	12:12:07 AM	PH3 valve closed
7/10/2012	12:12:07 AM	SiCl4 pre valve closed
7/10/2012	12:12:07 AM	SiCl4 post valve closed
7/10/2012	12:12:07 AM	Bypass valve closed
7/10/2012	12:12:07 AM	Bubbler valve closed
7/10/2012	12:12:07 AM	Helium valve opened
7/10/2012	12:12:07 AM	Main Vac valve opened
7/10/2012	12:12:07 AM	Helium MFC set to  20.000000
7/10/2012	12:12:07 AM	H2 MFC set to  0.000000
7/10/2012	12:12:07 AM	BCl3 MFC set to  0.000000
7/10/2012	12:12:07 AM	PH3 MFC set to  0.000000
7/10/2012	12:12:07 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:12:07 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:12:07 AM	Tube furnace set to 0
7/10/2012	12:12:37 AM	Helium valve closed
7/10/2012	12:12:37 AM	H2 valve closed
7/10/2012	12:12:37 AM	BCl3 valve closed
7/10/2012	12:12:37 AM	PH3 valve closed
7/10/2012	12:12:37 AM	SiCl4 pre valve closed
7/10/2012	12:12:37 AM	SiCl4 post valve closed
7/10/2012	12:12:37 AM	Bypass valve closed
7/10/2012	12:12:37 AM	Bubbler valve closed
7/10/2012	12:12:37 AM	Main Vac valve opened
7/10/2012	12:12:37 AM	Helium MFC set to  0.000000
7/10/2012	12:12:37 AM	H2 MFC set to  0.000000
7/10/2012	12:12:37 AM	BCl3 MFC set to  0.000000
7/10/2012	12:12:37 AM	PH3 MFC set to  0.000000
7/10/2012	12:12:37 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:12:37 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:12:37 AM	Tube furnace set to 0
7/10/2012	12:13:07 AM	H2 valve closed
7/10/2012	12:13:07 AM	BCl3 valve closed
7/10/2012	12:13:07 AM	PH3 valve closed
7/10/2012	12:13:07 AM	SiCl4 pre valve closed
7/10/2012	12:13:07 AM	SiCl4 post valve closed
7/10/2012	12:13:07 AM	Bypass valve closed
7/10/2012	12:13:07 AM	Bubbler valve closed
7/10/2012	12:13:08 AM	Helium valve opened
7/10/2012	12:13:08 AM	Main Vac valve opened
7/10/2012	12:13:08 AM	Helium MFC set to  20.000000
7/10/2012	12:13:08 AM	H2 MFC set to  0.000000
7/10/2012	12:13:08 AM	BCl3 MFC set to  0.000000
7/10/2012	12:13:08 AM	PH3 MFC set to  0.000000
7/10/2012	12:13:08 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:13:08 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:13:08 AM	Tube furnace set to 0
7/10/2012	12:13:38 AM	Helium valve closed
7/10/2012	12:13:38 AM	H2 valve closed
7/10/2012	12:13:38 AM	BCl3 valve closed
7/10/2012	12:13:38 AM	PH3 valve closed
7/10/2012	12:13:38 AM	SiCl4 pre valve closed
7/10/2012	12:13:38 AM	SiCl4 post valve closed
7/10/2012	12:13:38 AM	Bypass valve closed
7/10/2012	12:13:38 AM	Bubbler valve closed
7/10/2012	12:13:38 AM	Main Vac valve opened
7/10/2012	12:13:38 AM	Helium MFC set to  0.000000
7/10/2012	12:13:38 AM	H2 MFC set to  0.000000
7/10/2012	12:13:38 AM	BCl3 MFC set to  0.000000
7/10/2012	12:13:38 AM	PH3 MFC set to  0.000000
7/10/2012	12:13:38 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:13:38 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:13:38 AM	Tube furnace set to 0
7/10/2012	12:14:08 AM	H2 valve closed
7/10/2012	12:14:08 AM	BCl3 valve closed
7/10/2012	12:14:08 AM	PH3 valve closed
7/10/2012	12:14:08 AM	SiCl4 pre valve closed
7/10/2012	12:14:08 AM	SiCl4 post valve closed
7/10/2012	12:14:08 AM	Bypass valve closed
7/10/2012	12:14:08 AM	Bubbler valve closed
7/10/2012	12:14:08 AM	Helium valve opened
7/10/2012	12:14:08 AM	Main Vac valve opened
7/10/2012	12:14:08 AM	Helium MFC set to  20.000000
7/10/2012	12:14:08 AM	H2 MFC set to  0.000000
7/10/2012	12:14:08 AM	BCl3 MFC set to  0.000000
7/10/2012	12:14:08 AM	PH3 MFC set to  0.000000
7/10/2012	12:14:08 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:14:08 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:14:08 AM	Tube furnace set to 0
7/10/2012	12:14:38 AM	Helium valve closed
7/10/2012	12:14:38 AM	H2 valve closed
7/10/2012	12:14:38 AM	BCl3 valve closed
7/10/2012	12:14:38 AM	PH3 valve closed
7/10/2012	12:14:38 AM	SiCl4 pre valve closed
7/10/2012	12:14:38 AM	SiCl4 post valve closed
7/10/2012	12:14:38 AM	Bypass valve closed
7/10/2012	12:14:38 AM	Bubbler valve closed
7/10/2012	12:14:38 AM	Main Vac valve opened
7/10/2012	12:14:38 AM	Helium MFC set to  0.000000
7/10/2012	12:14:38 AM	H2 MFC set to  0.000000
7/10/2012	12:14:38 AM	BCl3 MFC set to  0.000000
7/10/2012	12:14:38 AM	PH3 MFC set to  0.000000
7/10/2012	12:14:38 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:14:38 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:14:38 AM	Tube furnace set to 0
7/10/2012	12:15:08 AM	H2 valve closed
7/10/2012	12:15:08 AM	BCl3 valve closed
7/10/2012	12:15:08 AM	PH3 valve closed
7/10/2012	12:15:08 AM	SiCl4 pre valve closed
7/10/2012	12:15:08 AM	SiCl4 post valve closed
7/10/2012	12:15:08 AM	Bypass valve closed
7/10/2012	12:15:08 AM	Bubbler valve closed
7/10/2012	12:15:08 AM	Helium valve opened
7/10/2012	12:15:08 AM	Main Vac valve opened
7/10/2012	12:15:08 AM	Helium MFC set to  20.000000
7/10/2012	12:15:08 AM	H2 MFC set to  0.000000
7/10/2012	12:15:08 AM	BCl3 MFC set to  0.000000
7/10/2012	12:15:08 AM	PH3 MFC set to  0.000000
7/10/2012	12:15:08 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:15:08 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:15:09 AM	Tube furnace set to 0
7/10/2012	12:15:39 AM	Helium valve closed
7/10/2012	12:15:39 AM	H2 valve closed
7/10/2012	12:15:39 AM	BCl3 valve closed
7/10/2012	12:15:39 AM	PH3 valve closed
7/10/2012	12:15:39 AM	SiCl4 pre valve closed
7/10/2012	12:15:39 AM	SiCl4 post valve closed
7/10/2012	12:15:39 AM	Bypass valve closed
7/10/2012	12:15:39 AM	Bubbler valve closed
7/10/2012	12:15:39 AM	Main Vac valve opened
7/10/2012	12:15:39 AM	Helium MFC set to  0.000000
7/10/2012	12:15:39 AM	H2 MFC set to  0.000000
7/10/2012	12:15:39 AM	BCl3 MFC set to  0.000000
7/10/2012	12:15:39 AM	PH3 MFC set to  0.000000
7/10/2012	12:15:39 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:15:39 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:15:39 AM	Tube furnace set to 0
7/10/2012	12:16:09 AM	H2 valve closed
7/10/2012	12:16:09 AM	BCl3 valve closed
7/10/2012	12:16:09 AM	PH3 valve closed
7/10/2012	12:16:09 AM	SiCl4 pre valve closed
7/10/2012	12:16:09 AM	SiCl4 post valve closed
7/10/2012	12:16:09 AM	Bypass valve closed
7/10/2012	12:16:09 AM	Bubbler valve closed
7/10/2012	12:16:09 AM	Helium valve opened
7/10/2012	12:16:09 AM	Main Vac valve opened
7/10/2012	12:16:09 AM	Helium MFC set to  20.000000
7/10/2012	12:16:09 AM	H2 MFC set to  0.000000
7/10/2012	12:16:09 AM	BCl3 MFC set to  0.000000
7/10/2012	12:16:09 AM	PH3 MFC set to  0.000000
7/10/2012	12:16:09 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:16:09 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:16:09 AM	Tube furnace set to 0
7/10/2012	12:16:39 AM	Helium valve closed
7/10/2012	12:16:39 AM	H2 valve closed
7/10/2012	12:16:39 AM	BCl3 valve closed
7/10/2012	12:16:39 AM	PH3 valve closed
7/10/2012	12:16:39 AM	SiCl4 pre valve closed
7/10/2012	12:16:39 AM	SiCl4 post valve closed
7/10/2012	12:16:39 AM	Bypass valve closed
7/10/2012	12:16:39 AM	Bubbler valve closed
7/10/2012	12:16:39 AM	Main Vac valve opened
7/10/2012	12:16:39 AM	Helium MFC set to  0.000000
7/10/2012	12:16:39 AM	H2 MFC set to  0.000000
7/10/2012	12:16:39 AM	BCl3 MFC set to  0.000000
7/10/2012	12:16:39 AM	PH3 MFC set to  0.000000
7/10/2012	12:16:39 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:16:39 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:16:39 AM	Tube furnace set to 0
7/10/2012	12:17:09 AM	H2 valve closed
7/10/2012	12:17:09 AM	BCl3 valve closed
7/10/2012	12:17:09 AM	PH3 valve closed
7/10/2012	12:17:09 AM	SiCl4 pre valve closed
7/10/2012	12:17:09 AM	SiCl4 post valve closed
7/10/2012	12:17:09 AM	Bypass valve closed
7/10/2012	12:17:09 AM	Bubbler valve closed
7/10/2012	12:17:09 AM	Helium valve opened
7/10/2012	12:17:09 AM	Main Vac valve opened
7/10/2012	12:17:09 AM	Helium MFC set to  20.000000
7/10/2012	12:17:09 AM	H2 MFC set to  0.000000
7/10/2012	12:17:09 AM	BCl3 MFC set to  0.000000
7/10/2012	12:17:09 AM	PH3 MFC set to  0.000000
7/10/2012	12:17:09 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:17:09 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:17:10 AM	Tube furnace set to 0
7/10/2012	12:17:40 AM	Helium valve closed
7/10/2012	12:17:40 AM	H2 valve closed
7/10/2012	12:17:40 AM	BCl3 valve closed
7/10/2012	12:17:40 AM	PH3 valve closed
7/10/2012	12:17:40 AM	SiCl4 pre valve closed
7/10/2012	12:17:40 AM	SiCl4 post valve closed
7/10/2012	12:17:40 AM	Bypass valve closed
7/10/2012	12:17:40 AM	Bubbler valve closed
7/10/2012	12:17:40 AM	Main Vac valve opened
7/10/2012	12:17:40 AM	Helium MFC set to  0.000000
7/10/2012	12:17:40 AM	H2 MFC set to  0.000000
7/10/2012	12:17:40 AM	BCl3 MFC set to  0.000000
7/10/2012	12:17:40 AM	PH3 MFC set to  0.000000
7/10/2012	12:17:40 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:17:40 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:17:40 AM	Tube furnace set to 0
7/10/2012	12:18:10 AM	H2 valve closed
7/10/2012	12:18:10 AM	BCl3 valve closed
7/10/2012	12:18:10 AM	PH3 valve closed
7/10/2012	12:18:10 AM	SiCl4 pre valve closed
7/10/2012	12:18:10 AM	SiCl4 post valve closed
7/10/2012	12:18:10 AM	Bypass valve closed
7/10/2012	12:18:10 AM	Bubbler valve closed
7/10/2012	12:18:10 AM	Helium valve opened
7/10/2012	12:18:10 AM	Main Vac valve opened
7/10/2012	12:18:10 AM	Helium MFC set to  20.000000
7/10/2012	12:18:10 AM	H2 MFC set to  0.000000
7/10/2012	12:18:10 AM	BCl3 MFC set to  0.000000
7/10/2012	12:18:10 AM	PH3 MFC set to  0.000000
7/10/2012	12:18:10 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:18:10 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:18:10 AM	Tube furnace set to 0
7/10/2012	12:18:40 AM	Helium valve closed
7/10/2012	12:18:40 AM	H2 valve closed
7/10/2012	12:18:40 AM	BCl3 valve closed
7/10/2012	12:18:40 AM	PH3 valve closed
7/10/2012	12:18:40 AM	SiCl4 pre valve closed
7/10/2012	12:18:40 AM	SiCl4 post valve closed
7/10/2012	12:18:40 AM	Bypass valve closed
7/10/2012	12:18:40 AM	Bubbler valve closed
7/10/2012	12:18:40 AM	Main Vac valve opened
7/10/2012	12:18:40 AM	Helium MFC set to  0.000000
7/10/2012	12:18:40 AM	H2 MFC set to  0.000000
7/10/2012	12:18:40 AM	BCl3 MFC set to  0.000000
7/10/2012	12:18:40 AM	PH3 MFC set to  0.000000
7/10/2012	12:18:40 AM	SiCl4 MFC set to  0.000000
7/10/2012	12:18:40 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:18:40 AM	Tube furnace set to 0
7/10/2012	12:18:41 AM	Run finished at 12:18 AM
7/10/2012	12:18:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/10/2012	9:16:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2012	9:16:43 AM	Recipe started at 9:16 AM
7/10/2012	9:16:43 AM	Helium valve closed
7/10/2012	9:16:43 AM	H2 valve closed
7/10/2012	9:16:43 AM	BCl3 valve closed
7/10/2012	9:16:43 AM	PH3 valve closed
7/10/2012	9:16:43 AM	SiCl4 pre valve closed
7/10/2012	9:16:43 AM	SiCl4 post valve closed
7/10/2012	9:16:43 AM	Main Vac valve closed
7/10/2012	9:16:43 AM	Bypass valve closed
7/10/2012	9:16:43 AM	Bubbler valve closed
7/10/2012	9:16:43 AM	Helium MFC set to  0.000000
7/10/2012	9:16:43 AM	H2 MFC set to  0.000000
7/10/2012	9:16:43 AM	BCl3 MFC set to  0.000000
7/10/2012	9:16:43 AM	PH3 MFC set to  0.000000
7/10/2012	9:16:43 AM	SiCl4 MFC set to  0.000000
7/10/2012	9:16:43 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	9:16:43 AM	Tube furnace set to 0
7/10/2012	9:16:46 AM	H2 valve closed
7/10/2012	9:16:46 AM	BCl3 valve closed
7/10/2012	9:16:46 AM	PH3 valve closed
7/10/2012	9:16:46 AM	SiCl4 pre valve closed
7/10/2012	9:16:46 AM	SiCl4 post valve closed
7/10/2012	9:16:46 AM	Main Vac valve closed
7/10/2012	9:16:46 AM	Bypass valve closed
7/10/2012	9:16:46 AM	Bubbler valve closed
7/10/2012	9:16:46 AM	Helium valve opened
7/10/2012	9:16:46 AM	Helium MFC set to  500.000000
7/10/2012	9:16:46 AM	H2 MFC set to  0.000000
7/10/2012	9:16:46 AM	BCl3 MFC set to  0.000000
7/10/2012	9:16:46 AM	PH3 MFC set to  0.000000
7/10/2012	9:16:46 AM	SiCl4 MFC set to  0.000000
7/10/2012	9:16:46 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	9:16:46 AM	Tube furnace set to 0
7/10/2012	9:17:59 AM	Helium valve closed
7/10/2012	9:17:59 AM	H2 valve closed
7/10/2012	9:17:59 AM	BCl3 valve closed
7/10/2012	9:17:59 AM	PH3 valve closed
7/10/2012	9:17:59 AM	SiCl4 pre valve closed
7/10/2012	9:17:59 AM	SiCl4 post valve closed
7/10/2012	9:17:59 AM	Main Vac valve closed
7/10/2012	9:17:59 AM	Bypass valve closed
7/10/2012	9:17:59 AM	Bubbler valve closed
7/10/2012	9:17:59 AM	Helium MFC set to  0.000000
7/10/2012	9:17:59 AM	H2 MFC set to  0.000000
7/10/2012	9:17:59 AM	BCl3 MFC set to  0.000000
7/10/2012	9:17:59 AM	PH3 MFC set to  0.000000
7/10/2012	9:17:59 AM	SiCl4 MFC set to  0.000000
7/10/2012	9:17:59 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	9:17:59 AM	Tube furnace set to 0
7/10/2012	9:18:00 AM	Run finished at 9:18 AM
7/10/2012	9:18:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2012	9:21:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2012	9:21:48 AM	Recipe started at 9:21 AM
7/10/2012	9:21:48 AM	Helium valve closed
7/10/2012	9:21:48 AM	H2 valve closed
7/10/2012	9:21:48 AM	BCl3 valve closed
7/10/2012	9:21:48 AM	PH3 valve closed
7/10/2012	9:21:48 AM	SiCl4 pre valve closed
7/10/2012	9:21:48 AM	SiCl4 post valve closed
7/10/2012	9:21:48 AM	Main Vac valve closed
7/10/2012	9:21:48 AM	Bubbler valve closed
7/10/2012	9:21:48 AM	Bypass valve opened
7/10/2012	9:21:48 AM	Helium MFC set to  0.000000
7/10/2012	9:21:48 AM	H2 MFC set to  0.000000
7/10/2012	9:21:48 AM	BCl3 MFC set to  0.000000
7/10/2012	9:21:48 AM	PH3 MFC set to  0.000000
7/10/2012	9:21:48 AM	SiCl4 MFC set to  0.000000
7/10/2012	9:21:48 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	9:21:48 AM	Tube furnace set to 0
7/10/2012	9:22:55 AM	Helium valve closed
7/10/2012	9:22:55 AM	H2 valve closed
7/10/2012	9:22:55 AM	BCl3 valve closed
7/10/2012	9:22:55 AM	PH3 valve closed
7/10/2012	9:22:55 AM	SiCl4 pre valve closed
7/10/2012	9:22:55 AM	SiCl4 post valve closed
7/10/2012	9:22:55 AM	Main Vac valve closed
7/10/2012	9:22:55 AM	Bubbler valve closed
7/10/2012	9:22:55 AM	Bypass valve opened
7/10/2012	9:22:55 AM	Helium MFC set to  0.000000
7/10/2012	9:22:55 AM	H2 MFC set to  0.000000
7/10/2012	9:22:55 AM	BCl3 MFC set to  0.000000
7/10/2012	9:22:55 AM	PH3 MFC set to  0.000000
7/10/2012	9:22:55 AM	SiCl4 MFC set to  0.000000
7/10/2012	9:22:55 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	9:22:56 AM	Tube furnace set to 0
7/10/2012	9:23:56 AM	Helium valve closed
7/10/2012	9:23:56 AM	H2 valve closed
7/10/2012	9:23:56 AM	BCl3 valve closed
7/10/2012	9:23:56 AM	PH3 valve closed
7/10/2012	9:23:56 AM	SiCl4 pre valve closed
7/10/2012	9:23:56 AM	SiCl4 post valve closed
7/10/2012	9:23:56 AM	Bypass valve closed
7/10/2012	9:23:56 AM	Bubbler valve closed
7/10/2012	9:23:56 AM	Main Vac valve opened
7/10/2012	9:23:56 AM	Helium MFC set to  0.000000
7/10/2012	9:23:56 AM	H2 MFC set to  0.000000
7/10/2012	9:23:56 AM	BCl3 MFC set to  0.000000
7/10/2012	9:23:56 AM	PH3 MFC set to  0.000000
7/10/2012	9:23:56 AM	SiCl4 MFC set to  0.000000
7/10/2012	9:23:56 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	9:23:56 AM	Tube furnace set to 0
7/10/2012	9:23:57 AM	Run finished at 9:23 AM
7/10/2012	9:23:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2012	10:56:18 AM	Main Vac valve closed
7/10/2012	10:56:31 AM	Main Vac valve opened
7/10/2012	10:58:04 AM	Recipe started at 10:58 AM
7/10/2012	10:58:04 AM	Helium valve closed
7/10/2012	10:58:04 AM	H2 valve closed
7/10/2012	10:58:04 AM	BCl3 valve closed
7/10/2012	10:58:04 AM	PH3 valve closed
7/10/2012	10:58:04 AM	SiCl4 pre valve closed
7/10/2012	10:58:04 AM	SiCl4 post valve closed
7/10/2012	10:58:04 AM	Bypass valve closed
7/10/2012	10:58:04 AM	Bubbler valve closed
7/10/2012	10:58:04 AM	Main Vac valve opened
7/10/2012	10:58:04 AM	Helium MFC set to  0.000000
7/10/2012	10:58:04 AM	H2 MFC set to  0.000000
7/10/2012	10:58:04 AM	BCl3 MFC set to  0.000000
7/10/2012	10:58:04 AM	PH3 MFC set to  0.000000
7/10/2012	10:58:04 AM	SiCl4 MFC set to  0.000000
7/10/2012	10:58:04 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	10:58:04 AM	Tube furnace set to 0
7/10/2012	10:58:07 AM	Helium valve closed
7/10/2012	10:58:07 AM	H2 valve closed
7/10/2012	10:58:07 AM	BCl3 valve closed
7/10/2012	10:58:07 AM	PH3 valve closed
7/10/2012	10:58:07 AM	SiCl4 pre valve closed
7/10/2012	10:58:07 AM	SiCl4 post valve closed
7/10/2012	10:58:07 AM	Main Vac valve closed
7/10/2012	10:58:07 AM	Bypass valve closed
7/10/2012	10:58:07 AM	Bubbler valve closed
7/10/2012	10:58:07 AM	Helium MFC set to  0.000000
7/10/2012	10:58:07 AM	H2 MFC set to  0.000000
7/10/2012	10:58:07 AM	BCl3 MFC set to  0.000000
7/10/2012	10:58:07 AM	PH3 MFC set to  0.000000
7/10/2012	10:58:07 AM	SiCl4 MFC set to  0.000000
7/10/2012	10:58:07 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	10:58:07 AM	Tube furnace set to 0
7/10/2012	10:58:10 AM	Helium valve closed
7/10/2012	10:58:10 AM	BCl3 valve closed
7/10/2012	10:58:10 AM	PH3 valve closed
7/10/2012	10:58:10 AM	SiCl4 pre valve closed
7/10/2012	10:58:10 AM	SiCl4 post valve closed
7/10/2012	10:58:10 AM	Main Vac valve closed
7/10/2012	10:58:10 AM	Bypass valve closed
7/10/2012	10:58:10 AM	Bubbler valve closed
7/10/2012	10:58:10 AM	H2 valve opened
7/10/2012	10:58:10 AM	Helium MFC set to  0.000000
7/10/2012	10:58:10 AM	H2 MFC set to  500.000000
7/10/2012	10:58:10 AM	BCl3 MFC set to  0.000000
7/10/2012	10:58:10 AM	PH3 MFC set to  0.000000
7/10/2012	10:58:10 AM	SiCl4 MFC set to  0.000000
7/10/2012	10:58:10 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	10:58:10 AM	Tube furnace set to 0
7/10/2012	10:59:26 AM	Helium valve closed
7/10/2012	10:59:26 AM	BCl3 valve closed
7/10/2012	10:59:26 AM	PH3 valve closed
7/10/2012	10:59:26 AM	SiCl4 pre valve closed
7/10/2012	10:59:26 AM	SiCl4 post valve closed
7/10/2012	10:59:26 AM	Main Vac valve closed
7/10/2012	10:59:26 AM	Bypass valve closed
7/10/2012	10:59:26 AM	H2 valve opened
7/10/2012	10:59:26 AM	Bubbler valve opened
7/10/2012	10:59:26 AM	Helium MFC set to  0.000000
7/10/2012	10:59:26 AM	H2 MFC set to  500.000000
7/10/2012	10:59:26 AM	BCl3 MFC set to  0.000000
7/10/2012	10:59:26 AM	PH3 MFC set to  0.000000
7/10/2012	10:59:26 AM	SiCl4 MFC set to  0.000000
7/10/2012	10:59:26 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	10:59:26 AM	Tube furnace set to 0
7/10/2012	10:59:27 AM	Helium valve closed
7/10/2012	10:59:27 AM	BCl3 valve closed
7/10/2012	10:59:27 AM	PH3 valve closed
7/10/2012	10:59:27 AM	SiCl4 pre valve closed
7/10/2012	10:59:27 AM	SiCl4 post valve closed
7/10/2012	10:59:27 AM	Main Vac valve closed
7/10/2012	10:59:27 AM	Bypass valve closed
7/10/2012	10:59:27 AM	H2 valve opened
7/10/2012	10:59:27 AM	Bubbler valve opened
7/10/2012	10:59:27 AM	Helium MFC set to  0.000000
7/10/2012	10:59:27 AM	H2 MFC set to  500.000000
7/10/2012	10:59:27 AM	BCl3 MFC set to  0.000000
7/10/2012	10:59:27 AM	PH3 MFC set to  0.000000
7/10/2012	10:59:27 AM	SiCl4 MFC set to  0.000000
7/10/2012	10:59:27 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	10:59:28 AM	Tube furnace set to 1000
7/10/2012	11:24:28 AM	Helium valve closed
7/10/2012	11:24:28 AM	PH3 valve closed
7/10/2012	11:24:28 AM	Main Vac valve closed
7/10/2012	11:24:28 AM	Bypass valve closed
7/10/2012	11:24:28 AM	H2 valve opened
7/10/2012	11:24:28 AM	BCl3 valve opened
7/10/2012	11:24:28 AM	SiCl4 pre valve opened
7/10/2012	11:24:28 AM	SiCl4 post valve opened
7/10/2012	11:24:28 AM	Bubbler valve opened
7/10/2012	11:24:28 AM	Helium MFC set to  0.000000
7/10/2012	11:24:28 AM	H2 MFC set to  440.000000
7/10/2012	11:24:28 AM	BCl3 MFC set to  10.000000
7/10/2012	11:24:28 AM	PH3 MFC set to  0.000000
7/10/2012	11:24:28 AM	SiCl4 MFC set to  50.000000
7/10/2012	11:24:28 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	11:24:28 AM	Tube furnace set to 1000
7/10/2012	11:33:28 AM	Helium valve closed
7/10/2012	11:33:28 AM	PH3 valve closed
7/10/2012	11:33:28 AM	Main Vac valve closed
7/10/2012	11:33:28 AM	Bypass valve closed
7/10/2012	11:33:28 AM	H2 valve opened
7/10/2012	11:33:28 AM	BCl3 valve opened
7/10/2012	11:33:28 AM	SiCl4 pre valve opened
7/10/2012	11:33:28 AM	SiCl4 post valve opened
7/10/2012	11:33:28 AM	Bubbler valve opened
7/10/2012	11:33:28 AM	Helium MFC set to  0.000000
7/10/2012	11:33:28 AM	H2 MFC set to  450.000000
7/10/2012	11:33:28 AM	BCl3 MFC set to  1.000000
7/10/2012	11:33:28 AM	PH3 MFC set to  0.000000
7/10/2012	11:33:28 AM	SiCl4 MFC set to  50.000000
7/10/2012	11:33:28 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	11:33:28 AM	Tube furnace set to 1000
7/10/2012	11:37:58 AM	Helium valve closed
7/10/2012	11:37:58 AM	BCl3 valve closed
7/10/2012	11:37:58 AM	PH3 valve closed
7/10/2012	11:37:58 AM	Main Vac valve closed
7/10/2012	11:37:58 AM	Bypass valve closed
7/10/2012	11:37:58 AM	H2 valve opened
7/10/2012	11:37:58 AM	SiCl4 pre valve opened
7/10/2012	11:37:58 AM	SiCl4 post valve opened
7/10/2012	11:37:58 AM	Bubbler valve opened
7/10/2012	11:37:58 AM	Helium MFC set to  0.000000
7/10/2012	11:37:58 AM	H2 MFC set to  450.000000
7/10/2012	11:37:58 AM	BCl3 MFC set to  0.000000
7/10/2012	11:37:58 AM	PH3 MFC set to  0.000000
7/10/2012	11:37:58 AM	SiCl4 MFC set to  50.000000
7/10/2012	11:37:58 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	11:37:58 AM	Tube furnace set to 1000
7/10/2012	11:42:28 AM	Helium valve closed
7/10/2012	11:42:28 AM	BCl3 valve closed
7/10/2012	11:42:28 AM	Main Vac valve closed
7/10/2012	11:42:28 AM	Bypass valve closed
7/10/2012	11:42:28 AM	H2 valve opened
7/10/2012	11:42:28 AM	PH3 valve opened
7/10/2012	11:42:28 AM	SiCl4 pre valve opened
7/10/2012	11:42:28 AM	SiCl4 post valve opened
7/10/2012	11:42:28 AM	Bubbler valve opened
7/10/2012	11:42:28 AM	Helium MFC set to  0.000000
7/10/2012	11:42:28 AM	H2 MFC set to  450.000000
7/10/2012	11:42:28 AM	BCl3 MFC set to  0.000000
7/10/2012	11:42:28 AM	PH3 MFC set to  1.000000
7/10/2012	11:42:28 AM	SiCl4 MFC set to  50.000000
7/10/2012	11:42:28 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	11:42:29 AM	Tube furnace set to 1000
7/10/2012	11:46:59 AM	Helium valve closed
7/10/2012	11:46:59 AM	BCl3 valve closed
7/10/2012	11:46:59 AM	Main Vac valve closed
7/10/2012	11:46:59 AM	Bypass valve closed
7/10/2012	11:46:59 AM	H2 valve opened
7/10/2012	11:46:59 AM	PH3 valve opened
7/10/2012	11:46:59 AM	SiCl4 pre valve opened
7/10/2012	11:46:59 AM	SiCl4 post valve opened
7/10/2012	11:46:59 AM	Bubbler valve opened
7/10/2012	11:46:59 AM	Helium MFC set to  0.000000
7/10/2012	11:46:59 AM	H2 MFC set to  430.000000
7/10/2012	11:46:59 AM	BCl3 MFC set to  0.000000
7/10/2012	11:46:59 AM	PH3 MFC set to  20.000000
7/10/2012	11:46:59 AM	SiCl4 MFC set to  50.000000
7/10/2012	11:46:59 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	11:46:59 AM	Tube furnace set to 1000
7/10/2012	11:53:44 AM	Helium valve closed
7/10/2012	11:53:44 AM	BCl3 valve closed
7/10/2012	11:53:44 AM	PH3 valve closed
7/10/2012	11:53:44 AM	SiCl4 pre valve closed
7/10/2012	11:53:44 AM	SiCl4 post valve closed
7/10/2012	11:53:44 AM	Main Vac valve closed
7/10/2012	11:53:44 AM	Bypass valve closed
7/10/2012	11:53:44 AM	H2 valve opened
7/10/2012	11:53:44 AM	Bubbler valve opened
7/10/2012	11:53:44 AM	Helium MFC set to  0.000000
7/10/2012	11:53:44 AM	H2 MFC set to  500.000000
7/10/2012	11:53:44 AM	BCl3 MFC set to  0.000000
7/10/2012	11:53:44 AM	PH3 MFC set to  0.000000
7/10/2012	11:53:44 AM	SiCl4 MFC set to  0.000000
7/10/2012	11:53:44 AM	Bypass solenoid MFC set to  0.000000
7/10/2012	11:53:44 AM	Tube furnace set to 750
7/10/2012	12:08:44 PM	H2 valve closed
7/10/2012	12:08:44 PM	BCl3 valve closed
7/10/2012	12:08:44 PM	PH3 valve closed
7/10/2012	12:08:44 PM	SiCl4 pre valve closed
7/10/2012	12:08:44 PM	SiCl4 post valve closed
7/10/2012	12:08:44 PM	Main Vac valve closed
7/10/2012	12:08:44 PM	Bypass valve closed
7/10/2012	12:08:44 PM	Helium valve opened
7/10/2012	12:08:44 PM	Bubbler valve opened
7/10/2012	12:08:44 PM	Helium MFC set to  500.000000
7/10/2012	12:08:44 PM	H2 MFC set to  0.000000
7/10/2012	12:08:44 PM	BCl3 MFC set to  0.000000
7/10/2012	12:08:44 PM	PH3 MFC set to  0.000000
7/10/2012	12:08:44 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:08:44 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:08:44 PM	Tube furnace set to 0
7/10/2012	12:28:44 PM	Helium valve closed
7/10/2012	12:28:44 PM	H2 valve closed
7/10/2012	12:28:44 PM	BCl3 valve closed
7/10/2012	12:28:44 PM	PH3 valve closed
7/10/2012	12:28:44 PM	SiCl4 pre valve closed
7/10/2012	12:28:44 PM	SiCl4 post valve closed
7/10/2012	12:28:44 PM	Main Vac valve closed
7/10/2012	12:28:44 PM	Bypass valve closed
7/10/2012	12:28:44 PM	Bubbler valve closed
7/10/2012	12:28:44 PM	Helium MFC set to  0.000000
7/10/2012	12:28:44 PM	H2 MFC set to  0.000000
7/10/2012	12:28:44 PM	BCl3 MFC set to  0.000000
7/10/2012	12:28:44 PM	PH3 MFC set to  0.000000
7/10/2012	12:28:44 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:28:44 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:28:44 PM	Tube furnace set to 0
7/10/2012	12:48:44 PM	Helium valve closed
7/10/2012	12:48:44 PM	H2 valve closed
7/10/2012	12:48:44 PM	BCl3 valve closed
7/10/2012	12:48:44 PM	PH3 valve closed
7/10/2012	12:48:44 PM	SiCl4 pre valve closed
7/10/2012	12:48:44 PM	SiCl4 post valve closed
7/10/2012	12:48:44 PM	Main Vac valve closed
7/10/2012	12:48:44 PM	Bubbler valve closed
7/10/2012	12:48:44 PM	Bypass valve opened
7/10/2012	12:48:44 PM	Helium MFC set to  0.000000
7/10/2012	12:48:44 PM	H2 MFC set to  0.000000
7/10/2012	12:48:44 PM	BCl3 MFC set to  0.000000
7/10/2012	12:48:44 PM	PH3 MFC set to  0.000000
7/10/2012	12:48:44 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:48:44 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:48:45 PM	Tube furnace set to 0
7/10/2012	12:49:36 PM	Helium valve closed
7/10/2012	12:49:36 PM	H2 valve closed
7/10/2012	12:49:36 PM	BCl3 valve closed
7/10/2012	12:49:36 PM	PH3 valve closed
7/10/2012	12:49:36 PM	SiCl4 pre valve closed
7/10/2012	12:49:36 PM	SiCl4 post valve closed
7/10/2012	12:49:36 PM	Main Vac valve closed
7/10/2012	12:49:36 PM	Bubbler valve closed
7/10/2012	12:49:36 PM	Bypass valve opened
7/10/2012	12:49:36 PM	Helium MFC set to  0.000000
7/10/2012	12:49:36 PM	H2 MFC set to  0.000000
7/10/2012	12:49:36 PM	BCl3 MFC set to  0.000000
7/10/2012	12:49:36 PM	PH3 MFC set to  0.000000
7/10/2012	12:49:36 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:49:36 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:49:36 PM	Tube furnace set to 0
7/10/2012	12:50:36 PM	Helium valve closed
7/10/2012	12:50:36 PM	H2 valve closed
7/10/2012	12:50:36 PM	BCl3 valve closed
7/10/2012	12:50:36 PM	PH3 valve closed
7/10/2012	12:50:36 PM	SiCl4 pre valve closed
7/10/2012	12:50:36 PM	SiCl4 post valve closed
7/10/2012	12:50:36 PM	Bypass valve closed
7/10/2012	12:50:36 PM	Bubbler valve closed
7/10/2012	12:50:36 PM	Main Vac valve opened
7/10/2012	12:50:36 PM	Helium MFC set to  0.000000
7/10/2012	12:50:36 PM	H2 MFC set to  0.000000
7/10/2012	12:50:36 PM	BCl3 MFC set to  0.000000
7/10/2012	12:50:36 PM	PH3 MFC set to  0.000000
7/10/2012	12:50:36 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:50:36 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:50:37 PM	Tube furnace set to 0
7/10/2012	12:56:57 PM	Run finished at 12:56 PM
7/10/2012	12:57:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2012	12:57:31 PM	Recipe started at 12:57 PM
7/10/2012	12:57:31 PM	Helium valve closed
7/10/2012	12:57:31 PM	H2 valve closed
7/10/2012	12:57:31 PM	BCl3 valve closed
7/10/2012	12:57:31 PM	PH3 valve closed
7/10/2012	12:57:31 PM	SiCl4 pre valve closed
7/10/2012	12:57:31 PM	SiCl4 post valve closed
7/10/2012	12:57:31 PM	Main Vac valve closed
7/10/2012	12:57:31 PM	Bypass valve closed
7/10/2012	12:57:31 PM	Bubbler valve closed
7/10/2012	12:57:31 PM	Helium MFC set to  0.000000
7/10/2012	12:57:31 PM	H2 MFC set to  0.000000
7/10/2012	12:57:31 PM	BCl3 MFC set to  0.000000
7/10/2012	12:57:31 PM	PH3 MFC set to  0.000000
7/10/2012	12:57:31 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:57:31 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:57:31 PM	Tube furnace set to 0
7/10/2012	12:57:34 PM	H2 valve closed
7/10/2012	12:57:34 PM	BCl3 valve closed
7/10/2012	12:57:34 PM	PH3 valve closed
7/10/2012	12:57:34 PM	SiCl4 pre valve closed
7/10/2012	12:57:34 PM	SiCl4 post valve closed
7/10/2012	12:57:34 PM	Main Vac valve closed
7/10/2012	12:57:34 PM	Bypass valve closed
7/10/2012	12:57:34 PM	Bubbler valve closed
7/10/2012	12:57:34 PM	Helium valve opened
7/10/2012	12:57:34 PM	Helium MFC set to  500.000000
7/10/2012	12:57:34 PM	H2 MFC set to  0.000000
7/10/2012	12:57:34 PM	BCl3 MFC set to  0.000000
7/10/2012	12:57:34 PM	PH3 MFC set to  0.000000
7/10/2012	12:57:34 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:57:34 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:57:34 PM	Tube furnace set to 0
7/10/2012	12:58:44 PM	Helium valve closed
7/10/2012	12:58:44 PM	H2 valve closed
7/10/2012	12:58:44 PM	BCl3 valve closed
7/10/2012	12:58:44 PM	PH3 valve closed
7/10/2012	12:58:44 PM	SiCl4 pre valve closed
7/10/2012	12:58:44 PM	SiCl4 post valve closed
7/10/2012	12:58:44 PM	Main Vac valve closed
7/10/2012	12:58:44 PM	Bypass valve closed
7/10/2012	12:58:44 PM	Bubbler valve closed
7/10/2012	12:58:44 PM	Helium MFC set to  0.000000
7/10/2012	12:58:44 PM	H2 MFC set to  0.000000
7/10/2012	12:58:44 PM	BCl3 MFC set to  0.000000
7/10/2012	12:58:44 PM	PH3 MFC set to  0.000000
7/10/2012	12:58:44 PM	SiCl4 MFC set to  0.000000
7/10/2012	12:58:44 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	12:58:44 PM	Tube furnace set to 0
7/10/2012	12:58:45 PM	Run finished at 12:58 PM
7/10/2012	12:58:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2012	1:03:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2012	1:03:55 PM	Recipe started at 1:03 PM
7/10/2012	1:03:55 PM	Helium valve closed
7/10/2012	1:03:55 PM	H2 valve closed
7/10/2012	1:03:55 PM	BCl3 valve closed
7/10/2012	1:03:55 PM	PH3 valve closed
7/10/2012	1:03:55 PM	SiCl4 pre valve closed
7/10/2012	1:03:55 PM	SiCl4 post valve closed
7/10/2012	1:03:55 PM	Main Vac valve closed
7/10/2012	1:03:55 PM	Bubbler valve closed
7/10/2012	1:03:55 PM	Bypass valve opened
7/10/2012	1:03:55 PM	Helium MFC set to  0.000000
7/10/2012	1:03:55 PM	H2 MFC set to  0.000000
7/10/2012	1:03:55 PM	BCl3 MFC set to  0.000000
7/10/2012	1:03:55 PM	PH3 MFC set to  0.000000
7/10/2012	1:03:55 PM	SiCl4 MFC set to  0.000000
7/10/2012	1:03:55 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	1:03:56 PM	Tube furnace set to 0
7/10/2012	1:05:05 PM	Helium valve closed
7/10/2012	1:05:05 PM	H2 valve closed
7/10/2012	1:05:05 PM	BCl3 valve closed
7/10/2012	1:05:05 PM	PH3 valve closed
7/10/2012	1:05:05 PM	SiCl4 pre valve closed
7/10/2012	1:05:05 PM	SiCl4 post valve closed
7/10/2012	1:05:05 PM	Main Vac valve closed
7/10/2012	1:05:05 PM	Bubbler valve closed
7/10/2012	1:05:05 PM	Bypass valve opened
7/10/2012	1:05:05 PM	Helium MFC set to  0.000000
7/10/2012	1:05:05 PM	H2 MFC set to  0.000000
7/10/2012	1:05:05 PM	BCl3 MFC set to  0.000000
7/10/2012	1:05:05 PM	PH3 MFC set to  0.000000
7/10/2012	1:05:05 PM	SiCl4 MFC set to  0.000000
7/10/2012	1:05:05 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	1:05:05 PM	Tube furnace set to 0
7/10/2012	1:06:05 PM	Helium valve closed
7/10/2012	1:06:05 PM	H2 valve closed
7/10/2012	1:06:05 PM	BCl3 valve closed
7/10/2012	1:06:05 PM	PH3 valve closed
7/10/2012	1:06:05 PM	SiCl4 pre valve closed
7/10/2012	1:06:05 PM	SiCl4 post valve closed
7/10/2012	1:06:05 PM	Bypass valve closed
7/10/2012	1:06:05 PM	Bubbler valve closed
7/10/2012	1:06:05 PM	Main Vac valve opened
7/10/2012	1:06:05 PM	Helium MFC set to  0.000000
7/10/2012	1:06:05 PM	H2 MFC set to  0.000000
7/10/2012	1:06:05 PM	BCl3 MFC set to  0.000000
7/10/2012	1:06:05 PM	PH3 MFC set to  0.000000
7/10/2012	1:06:05 PM	SiCl4 MFC set to  0.000000
7/10/2012	1:06:05 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	1:06:05 PM	Tube furnace set to 0
7/10/2012	1:06:06 PM	Run finished at 1:06 PM
7/10/2012	1:06:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2012	3:14:28 PM	Main Vac valve closed
7/10/2012	3:14:41 PM	Main Vac valve opened
7/10/2012	3:15:32 PM	Recipe started at 3:15 PM
7/10/2012	3:15:32 PM	Helium valve closed
7/10/2012	3:15:32 PM	H2 valve closed
7/10/2012	3:15:32 PM	BCl3 valve closed
7/10/2012	3:15:32 PM	PH3 valve closed
7/10/2012	3:15:32 PM	SiCl4 pre valve closed
7/10/2012	3:15:32 PM	SiCl4 post valve closed
7/10/2012	3:15:32 PM	Bypass valve closed
7/10/2012	3:15:32 PM	Bubbler valve closed
7/10/2012	3:15:32 PM	Main Vac valve opened
7/10/2012	3:15:32 PM	Helium MFC set to  0.000000
7/10/2012	3:15:32 PM	H2 MFC set to  0.000000
7/10/2012	3:15:32 PM	BCl3 MFC set to  0.000000
7/10/2012	3:15:32 PM	PH3 MFC set to  0.000000
7/10/2012	3:15:32 PM	SiCl4 MFC set to  0.000000
7/10/2012	3:15:32 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:15:32 PM	Tube furnace set to 0
7/10/2012	3:15:35 PM	Helium valve closed
7/10/2012	3:15:35 PM	H2 valve closed
7/10/2012	3:15:35 PM	BCl3 valve closed
7/10/2012	3:15:35 PM	PH3 valve closed
7/10/2012	3:15:35 PM	SiCl4 pre valve closed
7/10/2012	3:15:35 PM	SiCl4 post valve closed
7/10/2012	3:15:35 PM	Main Vac valve closed
7/10/2012	3:15:35 PM	Bypass valve closed
7/10/2012	3:15:35 PM	Bubbler valve closed
7/10/2012	3:15:35 PM	Helium MFC set to  0.000000
7/10/2012	3:15:35 PM	H2 MFC set to  0.000000
7/10/2012	3:15:35 PM	BCl3 MFC set to  0.000000
7/10/2012	3:15:35 PM	PH3 MFC set to  0.000000
7/10/2012	3:15:35 PM	SiCl4 MFC set to  0.000000
7/10/2012	3:15:35 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:15:35 PM	Tube furnace set to 0
7/10/2012	3:15:38 PM	Helium valve closed
7/10/2012	3:15:38 PM	BCl3 valve closed
7/10/2012	3:15:38 PM	PH3 valve closed
7/10/2012	3:15:38 PM	SiCl4 pre valve closed
7/10/2012	3:15:38 PM	SiCl4 post valve closed
7/10/2012	3:15:38 PM	Main Vac valve closed
7/10/2012	3:15:38 PM	Bypass valve closed
7/10/2012	3:15:38 PM	Bubbler valve closed
7/10/2012	3:15:38 PM	H2 valve opened
7/10/2012	3:15:38 PM	Helium MFC set to  0.000000
7/10/2012	3:15:38 PM	H2 MFC set to  500.000000
7/10/2012	3:15:38 PM	BCl3 MFC set to  0.000000
7/10/2012	3:15:38 PM	PH3 MFC set to  0.000000
7/10/2012	3:15:38 PM	SiCl4 MFC set to  0.000000
7/10/2012	3:15:38 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:15:38 PM	Tube furnace set to 0
7/10/2012	3:16:53 PM	Helium valve closed
7/10/2012	3:16:53 PM	BCl3 valve closed
7/10/2012	3:16:53 PM	PH3 valve closed
7/10/2012	3:16:53 PM	SiCl4 pre valve closed
7/10/2012	3:16:53 PM	SiCl4 post valve closed
7/10/2012	3:16:53 PM	Main Vac valve closed
7/10/2012	3:16:53 PM	Bypass valve closed
7/10/2012	3:16:53 PM	H2 valve opened
7/10/2012	3:16:53 PM	Bubbler valve opened
7/10/2012	3:16:53 PM	Helium MFC set to  0.000000
7/10/2012	3:16:53 PM	H2 MFC set to  500.000000
7/10/2012	3:16:53 PM	BCl3 MFC set to  0.000000
7/10/2012	3:16:53 PM	PH3 MFC set to  0.000000
7/10/2012	3:16:53 PM	SiCl4 MFC set to  0.000000
7/10/2012	3:16:53 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:16:53 PM	Tube furnace set to 0
7/10/2012	3:16:54 PM	Helium valve closed
7/10/2012	3:16:54 PM	BCl3 valve closed
7/10/2012	3:16:54 PM	PH3 valve closed
7/10/2012	3:16:54 PM	SiCl4 pre valve closed
7/10/2012	3:16:54 PM	SiCl4 post valve closed
7/10/2012	3:16:54 PM	Main Vac valve closed
7/10/2012	3:16:54 PM	Bypass valve closed
7/10/2012	3:16:54 PM	H2 valve opened
7/10/2012	3:16:54 PM	Bubbler valve opened
7/10/2012	3:16:54 PM	Helium MFC set to  0.000000
7/10/2012	3:16:54 PM	H2 MFC set to  500.000000
7/10/2012	3:16:54 PM	BCl3 MFC set to  0.000000
7/10/2012	3:16:54 PM	PH3 MFC set to  0.000000
7/10/2012	3:16:54 PM	SiCl4 MFC set to  0.000000
7/10/2012	3:16:54 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:16:54 PM	Tube furnace set to 1000
7/10/2012	3:41:54 PM	Helium valve closed
7/10/2012	3:41:54 PM	BCl3 valve closed
7/10/2012	3:41:54 PM	Main Vac valve closed
7/10/2012	3:41:54 PM	Bypass valve closed
7/10/2012	3:41:54 PM	H2 valve opened
7/10/2012	3:41:54 PM	PH3 valve opened
7/10/2012	3:41:54 PM	SiCl4 pre valve opened
7/10/2012	3:41:54 PM	SiCl4 post valve opened
7/10/2012	3:41:54 PM	Bubbler valve opened
7/10/2012	3:41:54 PM	Helium MFC set to  0.000000
7/10/2012	3:41:54 PM	H2 MFC set to  430.000000
7/10/2012	3:41:54 PM	BCl3 MFC set to  0.000000
7/10/2012	3:41:54 PM	PH3 MFC set to  20.000000
7/10/2012	3:41:54 PM	SiCl4 MFC set to  50.000000
7/10/2012	3:41:54 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:41:54 PM	Tube furnace set to 1000
7/10/2012	3:50:54 PM	Helium valve closed
7/10/2012	3:50:54 PM	BCl3 valve closed
7/10/2012	3:50:54 PM	Main Vac valve closed
7/10/2012	3:50:54 PM	Bypass valve closed
7/10/2012	3:50:54 PM	H2 valve opened
7/10/2012	3:50:54 PM	PH3 valve opened
7/10/2012	3:50:54 PM	SiCl4 pre valve opened
7/10/2012	3:50:54 PM	SiCl4 post valve opened
7/10/2012	3:50:54 PM	Bubbler valve opened
7/10/2012	3:50:54 PM	Helium MFC set to  0.000000
7/10/2012	3:50:54 PM	H2 MFC set to  450.000000
7/10/2012	3:50:54 PM	BCl3 MFC set to  0.000000
7/10/2012	3:50:54 PM	PH3 MFC set to  1.000000
7/10/2012	3:50:54 PM	SiCl4 MFC set to  50.000000
7/10/2012	3:50:54 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:50:54 PM	Tube furnace set to 1000
7/10/2012	3:55:25 PM	Helium valve closed
7/10/2012	3:55:25 PM	BCl3 valve closed
7/10/2012	3:55:25 PM	PH3 valve closed
7/10/2012	3:55:25 PM	Main Vac valve closed
7/10/2012	3:55:25 PM	Bypass valve closed
7/10/2012	3:55:25 PM	H2 valve opened
7/10/2012	3:55:25 PM	SiCl4 pre valve opened
7/10/2012	3:55:25 PM	SiCl4 post valve opened
7/10/2012	3:55:25 PM	Bubbler valve opened
7/10/2012	3:55:25 PM	Helium MFC set to  0.000000
7/10/2012	3:55:25 PM	H2 MFC set to  450.000000
7/10/2012	3:55:25 PM	BCl3 MFC set to  0.000000
7/10/2012	3:55:25 PM	PH3 MFC set to  0.000000
7/10/2012	3:55:25 PM	SiCl4 MFC set to  50.000000
7/10/2012	3:55:25 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:55:25 PM	Tube furnace set to 1000
7/10/2012	3:59:55 PM	Helium valve closed
7/10/2012	3:59:55 PM	PH3 valve closed
7/10/2012	3:59:55 PM	Main Vac valve closed
7/10/2012	3:59:55 PM	Bypass valve closed
7/10/2012	3:59:55 PM	H2 valve opened
7/10/2012	3:59:55 PM	BCl3 valve opened
7/10/2012	3:59:55 PM	SiCl4 pre valve opened
7/10/2012	3:59:55 PM	SiCl4 post valve opened
7/10/2012	3:59:55 PM	Bubbler valve opened
7/10/2012	3:59:55 PM	Helium MFC set to  0.000000
7/10/2012	3:59:55 PM	H2 MFC set to  450.000000
7/10/2012	3:59:55 PM	BCl3 MFC set to  1.000000
7/10/2012	3:59:55 PM	PH3 MFC set to  0.000000
7/10/2012	3:59:55 PM	SiCl4 MFC set to  50.000000
7/10/2012	3:59:55 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	3:59:55 PM	Tube furnace set to 1000
7/10/2012	4:04:25 PM	Helium valve closed
7/10/2012	4:04:25 PM	PH3 valve closed
7/10/2012	4:04:25 PM	Main Vac valve closed
7/10/2012	4:04:25 PM	Bypass valve closed
7/10/2012	4:04:25 PM	H2 valve opened
7/10/2012	4:04:25 PM	BCl3 valve opened
7/10/2012	4:04:25 PM	SiCl4 pre valve opened
7/10/2012	4:04:25 PM	SiCl4 post valve opened
7/10/2012	4:04:25 PM	Bubbler valve opened
7/10/2012	4:04:25 PM	Helium MFC set to  0.000000
7/10/2012	4:04:25 PM	H2 MFC set to  440.000000
7/10/2012	4:04:25 PM	BCl3 MFC set to  10.000000
7/10/2012	4:04:25 PM	PH3 MFC set to  0.000000
7/10/2012	4:04:25 PM	SiCl4 MFC set to  50.000000
7/10/2012	4:04:25 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	4:04:25 PM	Tube furnace set to 1000
7/10/2012	4:11:10 PM	Helium valve closed
7/10/2012	4:11:10 PM	BCl3 valve closed
7/10/2012	4:11:10 PM	PH3 valve closed
7/10/2012	4:11:10 PM	SiCl4 pre valve closed
7/10/2012	4:11:10 PM	SiCl4 post valve closed
7/10/2012	4:11:10 PM	Main Vac valve closed
7/10/2012	4:11:10 PM	Bypass valve closed
7/10/2012	4:11:10 PM	H2 valve opened
7/10/2012	4:11:10 PM	Bubbler valve opened
7/10/2012	4:11:10 PM	Helium MFC set to  0.000000
7/10/2012	4:11:10 PM	H2 MFC set to  500.000000
7/10/2012	4:11:10 PM	BCl3 MFC set to  0.000000
7/10/2012	4:11:10 PM	PH3 MFC set to  0.000000
7/10/2012	4:11:10 PM	SiCl4 MFC set to  0.000000
7/10/2012	4:11:10 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	4:11:11 PM	Tube furnace set to 750
7/10/2012	4:26:11 PM	H2 valve closed
7/10/2012	4:26:11 PM	BCl3 valve closed
7/10/2012	4:26:11 PM	PH3 valve closed
7/10/2012	4:26:11 PM	SiCl4 pre valve closed
7/10/2012	4:26:11 PM	SiCl4 post valve closed
7/10/2012	4:26:11 PM	Main Vac valve closed
7/10/2012	4:26:11 PM	Bypass valve closed
7/10/2012	4:26:11 PM	Helium valve opened
7/10/2012	4:26:11 PM	Bubbler valve opened
7/10/2012	4:26:11 PM	Helium MFC set to  500.000000
7/10/2012	4:26:11 PM	H2 MFC set to  0.000000
7/10/2012	4:26:11 PM	BCl3 MFC set to  0.000000
7/10/2012	4:26:11 PM	PH3 MFC set to  0.000000
7/10/2012	4:26:11 PM	SiCl4 MFC set to  0.000000
7/10/2012	4:26:11 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	4:26:11 PM	Tube furnace set to 0
7/10/2012	4:46:11 PM	Helium valve closed
7/10/2012	4:46:11 PM	H2 valve closed
7/10/2012	4:46:11 PM	BCl3 valve closed
7/10/2012	4:46:11 PM	PH3 valve closed
7/10/2012	4:46:11 PM	SiCl4 pre valve closed
7/10/2012	4:46:11 PM	SiCl4 post valve closed
7/10/2012	4:46:11 PM	Main Vac valve closed
7/10/2012	4:46:11 PM	Bypass valve closed
7/10/2012	4:46:11 PM	Bubbler valve closed
7/10/2012	4:46:11 PM	Helium MFC set to  0.000000
7/10/2012	4:46:11 PM	H2 MFC set to  0.000000
7/10/2012	4:46:11 PM	BCl3 MFC set to  0.000000
7/10/2012	4:46:11 PM	PH3 MFC set to  0.000000
7/10/2012	4:46:11 PM	SiCl4 MFC set to  0.000000
7/10/2012	4:46:11 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	4:46:11 PM	Tube furnace set to 0
7/10/2012	5:06:11 PM	Helium valve closed
7/10/2012	5:06:11 PM	H2 valve closed
7/10/2012	5:06:11 PM	BCl3 valve closed
7/10/2012	5:06:11 PM	PH3 valve closed
7/10/2012	5:06:11 PM	SiCl4 pre valve closed
7/10/2012	5:06:11 PM	SiCl4 post valve closed
7/10/2012	5:06:11 PM	Main Vac valve closed
7/10/2012	5:06:11 PM	Bubbler valve closed
7/10/2012	5:06:11 PM	Bypass valve opened
7/10/2012	5:06:11 PM	Helium MFC set to  0.000000
7/10/2012	5:06:11 PM	H2 MFC set to  0.000000
7/10/2012	5:06:11 PM	BCl3 MFC set to  0.000000
7/10/2012	5:06:11 PM	PH3 MFC set to  0.000000
7/10/2012	5:06:11 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:06:11 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:06:11 PM	Tube furnace set to 0
7/10/2012	5:07:02 PM	Helium valve closed
7/10/2012	5:07:02 PM	H2 valve closed
7/10/2012	5:07:02 PM	BCl3 valve closed
7/10/2012	5:07:02 PM	PH3 valve closed
7/10/2012	5:07:02 PM	SiCl4 pre valve closed
7/10/2012	5:07:02 PM	SiCl4 post valve closed
7/10/2012	5:07:02 PM	Main Vac valve closed
7/10/2012	5:07:02 PM	Bubbler valve closed
7/10/2012	5:07:02 PM	Bypass valve opened
7/10/2012	5:07:02 PM	Helium MFC set to  0.000000
7/10/2012	5:07:02 PM	H2 MFC set to  0.000000
7/10/2012	5:07:02 PM	BCl3 MFC set to  0.000000
7/10/2012	5:07:02 PM	PH3 MFC set to  0.000000
7/10/2012	5:07:02 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:07:02 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:07:02 PM	Tube furnace set to 0
7/10/2012	5:08:02 PM	Helium valve closed
7/10/2012	5:08:02 PM	H2 valve closed
7/10/2012	5:08:02 PM	BCl3 valve closed
7/10/2012	5:08:02 PM	PH3 valve closed
7/10/2012	5:08:02 PM	SiCl4 pre valve closed
7/10/2012	5:08:02 PM	SiCl4 post valve closed
7/10/2012	5:08:02 PM	Bypass valve closed
7/10/2012	5:08:02 PM	Bubbler valve closed
7/10/2012	5:08:02 PM	Main Vac valve opened
7/10/2012	5:08:02 PM	Helium MFC set to  0.000000
7/10/2012	5:08:02 PM	H2 MFC set to  0.000000
7/10/2012	5:08:02 PM	BCl3 MFC set to  0.000000
7/10/2012	5:08:02 PM	PH3 MFC set to  0.000000
7/10/2012	5:08:02 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:08:02 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:08:02 PM	Tube furnace set to 0
7/10/2012	5:09:13 PM	Run finished at 5:09 PM
7/10/2012	5:13:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2012	5:13:49 PM	Recipe started at 5:13 PM
7/10/2012	5:13:49 PM	Helium valve closed
7/10/2012	5:13:49 PM	H2 valve closed
7/10/2012	5:13:49 PM	BCl3 valve closed
7/10/2012	5:13:49 PM	PH3 valve closed
7/10/2012	5:13:49 PM	SiCl4 pre valve closed
7/10/2012	5:13:49 PM	SiCl4 post valve closed
7/10/2012	5:13:49 PM	Main Vac valve closed
7/10/2012	5:13:49 PM	Bypass valve closed
7/10/2012	5:13:49 PM	Bubbler valve closed
7/10/2012	5:13:49 PM	Helium MFC set to  0.000000
7/10/2012	5:13:49 PM	H2 MFC set to  0.000000
7/10/2012	5:13:49 PM	BCl3 MFC set to  0.000000
7/10/2012	5:13:49 PM	PH3 MFC set to  0.000000
7/10/2012	5:13:49 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:13:49 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:13:50 PM	Tube furnace set to 0
7/10/2012	5:13:53 PM	H2 valve closed
7/10/2012	5:13:53 PM	BCl3 valve closed
7/10/2012	5:13:53 PM	PH3 valve closed
7/10/2012	5:13:53 PM	SiCl4 pre valve closed
7/10/2012	5:13:53 PM	SiCl4 post valve closed
7/10/2012	5:13:53 PM	Main Vac valve closed
7/10/2012	5:13:53 PM	Bypass valve closed
7/10/2012	5:13:53 PM	Bubbler valve closed
7/10/2012	5:13:53 PM	Helium valve opened
7/10/2012	5:13:53 PM	Helium MFC set to  500.000000
7/10/2012	5:13:53 PM	H2 MFC set to  0.000000
7/10/2012	5:13:53 PM	BCl3 MFC set to  0.000000
7/10/2012	5:13:53 PM	PH3 MFC set to  0.000000
7/10/2012	5:13:53 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:13:53 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:13:53 PM	Tube furnace set to 0
7/10/2012	5:15:02 PM	Helium valve closed
7/10/2012	5:15:02 PM	H2 valve closed
7/10/2012	5:15:02 PM	BCl3 valve closed
7/10/2012	5:15:02 PM	PH3 valve closed
7/10/2012	5:15:02 PM	SiCl4 pre valve closed
7/10/2012	5:15:02 PM	SiCl4 post valve closed
7/10/2012	5:15:02 PM	Main Vac valve closed
7/10/2012	5:15:02 PM	Bypass valve closed
7/10/2012	5:15:02 PM	Bubbler valve closed
7/10/2012	5:15:02 PM	Helium MFC set to  0.000000
7/10/2012	5:15:02 PM	H2 MFC set to  0.000000
7/10/2012	5:15:02 PM	BCl3 MFC set to  0.000000
7/10/2012	5:15:02 PM	PH3 MFC set to  0.000000
7/10/2012	5:15:02 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:15:02 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:15:02 PM	Tube furnace set to 0
7/10/2012	5:15:03 PM	Run finished at 5:15 PM
7/10/2012	5:15:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2012	5:18:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2012	5:18:40 PM	Recipe started at 5:18 PM
7/10/2012	5:18:40 PM	Helium valve closed
7/10/2012	5:18:40 PM	H2 valve closed
7/10/2012	5:18:40 PM	BCl3 valve closed
7/10/2012	5:18:40 PM	PH3 valve closed
7/10/2012	5:18:40 PM	SiCl4 pre valve closed
7/10/2012	5:18:40 PM	SiCl4 post valve closed
7/10/2012	5:18:40 PM	Main Vac valve closed
7/10/2012	5:18:40 PM	Bubbler valve closed
7/10/2012	5:18:40 PM	Bypass valve opened
7/10/2012	5:18:40 PM	Helium MFC set to  0.000000
7/10/2012	5:18:40 PM	H2 MFC set to  0.000000
7/10/2012	5:18:40 PM	BCl3 MFC set to  0.000000
7/10/2012	5:18:40 PM	PH3 MFC set to  0.000000
7/10/2012	5:18:40 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:18:40 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:18:40 PM	Tube furnace set to 0
7/10/2012	5:19:46 PM	Helium valve closed
7/10/2012	5:19:46 PM	H2 valve closed
7/10/2012	5:19:46 PM	BCl3 valve closed
7/10/2012	5:19:46 PM	PH3 valve closed
7/10/2012	5:19:46 PM	SiCl4 pre valve closed
7/10/2012	5:19:46 PM	SiCl4 post valve closed
7/10/2012	5:19:46 PM	Main Vac valve closed
7/10/2012	5:19:46 PM	Bubbler valve closed
7/10/2012	5:19:46 PM	Bypass valve opened
7/10/2012	5:19:46 PM	Helium MFC set to  0.000000
7/10/2012	5:19:46 PM	H2 MFC set to  0.000000
7/10/2012	5:19:46 PM	BCl3 MFC set to  0.000000
7/10/2012	5:19:46 PM	PH3 MFC set to  0.000000
7/10/2012	5:19:46 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:19:46 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:19:46 PM	Tube furnace set to 0
7/10/2012	5:20:46 PM	Helium valve closed
7/10/2012	5:20:46 PM	H2 valve closed
7/10/2012	5:20:46 PM	BCl3 valve closed
7/10/2012	5:20:46 PM	PH3 valve closed
7/10/2012	5:20:46 PM	SiCl4 pre valve closed
7/10/2012	5:20:46 PM	SiCl4 post valve closed
7/10/2012	5:20:46 PM	Bypass valve closed
7/10/2012	5:20:46 PM	Bubbler valve closed
7/10/2012	5:20:46 PM	Main Vac valve opened
7/10/2012	5:20:46 PM	Helium MFC set to  0.000000
7/10/2012	5:20:46 PM	H2 MFC set to  0.000000
7/10/2012	5:20:46 PM	BCl3 MFC set to  0.000000
7/10/2012	5:20:46 PM	PH3 MFC set to  0.000000
7/10/2012	5:20:46 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:20:46 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:20:46 PM	Tube furnace set to 0
7/10/2012	5:20:47 PM	Run finished at 5:20 PM
7/10/2012	5:20:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2012	5:22:17 PM	Recipe started at 5:22 PM
7/10/2012	5:22:17 PM	Helium valve closed
7/10/2012	5:22:17 PM	H2 valve closed
7/10/2012	5:22:17 PM	BCl3 valve closed
7/10/2012	5:22:17 PM	PH3 valve closed
7/10/2012	5:22:17 PM	SiCl4 pre valve closed
7/10/2012	5:22:17 PM	SiCl4 post valve closed
7/10/2012	5:22:17 PM	Bypass valve closed
7/10/2012	5:22:17 PM	Bubbler valve closed
7/10/2012	5:22:17 PM	Main Vac valve opened
7/10/2012	5:22:17 PM	Helium MFC set to  0.000000
7/10/2012	5:22:17 PM	H2 MFC set to  0.000000
7/10/2012	5:22:17 PM	BCl3 MFC set to  0.000000
7/10/2012	5:22:17 PM	PH3 MFC set to  0.000000
7/10/2012	5:22:17 PM	SiCl4 MFC set to  0.000000
7/10/2012	5:22:17 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	5:22:17 PM	Tube furnace set to 0
7/10/2012	6:52:17 PM	Helium valve closed
7/10/2012	6:52:17 PM	H2 valve closed
7/10/2012	6:52:17 PM	BCl3 valve closed
7/10/2012	6:52:17 PM	PH3 valve closed
7/10/2012	6:52:17 PM	SiCl4 pre valve closed
7/10/2012	6:52:17 PM	SiCl4 post valve closed
7/10/2012	6:52:17 PM	Main Vac valve closed
7/10/2012	6:52:17 PM	Bypass valve closed
7/10/2012	6:52:17 PM	Bubbler valve closed
7/10/2012	6:52:17 PM	Helium MFC set to  0.000000
7/10/2012	6:52:17 PM	H2 MFC set to  0.000000
7/10/2012	6:52:17 PM	BCl3 MFC set to  0.000000
7/10/2012	6:52:17 PM	PH3 MFC set to  0.000000
7/10/2012	6:52:17 PM	SiCl4 MFC set to  0.000000
7/10/2012	6:52:17 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	6:52:18 PM	Tube furnace set to 0
7/10/2012	6:52:21 PM	Helium valve closed
7/10/2012	6:52:21 PM	BCl3 valve closed
7/10/2012	6:52:21 PM	PH3 valve closed
7/10/2012	6:52:21 PM	SiCl4 pre valve closed
7/10/2012	6:52:21 PM	SiCl4 post valve closed
7/10/2012	6:52:21 PM	Main Vac valve closed
7/10/2012	6:52:21 PM	Bypass valve closed
7/10/2012	6:52:21 PM	Bubbler valve closed
7/10/2012	6:52:21 PM	H2 valve opened
7/10/2012	6:52:21 PM	Helium MFC set to  0.000000
7/10/2012	6:52:21 PM	H2 MFC set to  500.000000
7/10/2012	6:52:21 PM	BCl3 MFC set to  0.000000
7/10/2012	6:52:21 PM	PH3 MFC set to  0.000000
7/10/2012	6:52:21 PM	SiCl4 MFC set to  0.000000
7/10/2012	6:52:21 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	6:52:21 PM	Tube furnace set to 0
7/10/2012	6:53:34 PM	Helium valve closed
7/10/2012	6:53:34 PM	BCl3 valve closed
7/10/2012	6:53:34 PM	PH3 valve closed
7/10/2012	6:53:34 PM	SiCl4 pre valve closed
7/10/2012	6:53:34 PM	SiCl4 post valve closed
7/10/2012	6:53:34 PM	Main Vac valve closed
7/10/2012	6:53:34 PM	Bypass valve closed
7/10/2012	6:53:34 PM	H2 valve opened
7/10/2012	6:53:34 PM	Bubbler valve opened
7/10/2012	6:53:34 PM	Helium MFC set to  0.000000
7/10/2012	6:53:34 PM	H2 MFC set to  500.000000
7/10/2012	6:53:34 PM	BCl3 MFC set to  0.000000
7/10/2012	6:53:34 PM	PH3 MFC set to  0.000000
7/10/2012	6:53:34 PM	SiCl4 MFC set to  0.000000
7/10/2012	6:53:34 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	6:53:34 PM	Tube furnace set to 0
7/10/2012	6:53:35 PM	Helium valve closed
7/10/2012	6:53:35 PM	BCl3 valve closed
7/10/2012	6:53:35 PM	PH3 valve closed
7/10/2012	6:53:35 PM	SiCl4 pre valve closed
7/10/2012	6:53:35 PM	SiCl4 post valve closed
7/10/2012	6:53:35 PM	Main Vac valve closed
7/10/2012	6:53:35 PM	Bypass valve closed
7/10/2012	6:53:35 PM	H2 valve opened
7/10/2012	6:53:35 PM	Bubbler valve opened
7/10/2012	6:53:35 PM	Helium MFC set to  0.000000
7/10/2012	6:53:35 PM	H2 MFC set to  500.000000
7/10/2012	6:53:35 PM	BCl3 MFC set to  0.000000
7/10/2012	6:53:35 PM	PH3 MFC set to  0.000000
7/10/2012	6:53:35 PM	SiCl4 MFC set to  0.000000
7/10/2012	6:53:35 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	6:53:35 PM	Tube furnace set to 1000
7/10/2012	7:18:35 PM	Helium valve closed
7/10/2012	7:18:35 PM	PH3 valve closed
7/10/2012	7:18:35 PM	Main Vac valve closed
7/10/2012	7:18:35 PM	Bypass valve closed
7/10/2012	7:18:35 PM	H2 valve opened
7/10/2012	7:18:35 PM	BCl3 valve opened
7/10/2012	7:18:35 PM	SiCl4 pre valve opened
7/10/2012	7:18:35 PM	SiCl4 post valve opened
7/10/2012	7:18:35 PM	Bubbler valve opened
7/10/2012	7:18:35 PM	Helium MFC set to  0.000000
7/10/2012	7:18:35 PM	H2 MFC set to  450.000000
7/10/2012	7:18:35 PM	BCl3 MFC set to  1.000000
7/10/2012	7:18:35 PM	PH3 MFC set to  0.000000
7/10/2012	7:18:35 PM	SiCl4 MFC set to  50.000000
7/10/2012	7:18:35 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	7:18:36 PM	Tube furnace set to 1000
7/10/2012	7:33:21 PM	Helium valve closed
7/10/2012	7:33:21 PM	BCl3 valve closed
7/10/2012	7:33:21 PM	Main Vac valve closed
7/10/2012	7:33:21 PM	Bypass valve closed
7/10/2012	7:33:21 PM	H2 valve opened
7/10/2012	7:33:21 PM	PH3 valve opened
7/10/2012	7:33:21 PM	SiCl4 pre valve opened
7/10/2012	7:33:21 PM	SiCl4 post valve opened
7/10/2012	7:33:21 PM	Bubbler valve opened
7/10/2012	7:33:21 PM	Helium MFC set to  0.000000
7/10/2012	7:33:21 PM	H2 MFC set to  430.000000
7/10/2012	7:33:21 PM	BCl3 MFC set to  0.000000
7/10/2012	7:33:21 PM	PH3 MFC set to  20.000000
7/10/2012	7:33:21 PM	SiCl4 MFC set to  50.000000
7/10/2012	7:33:21 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	7:33:21 PM	Tube furnace set to 1000
7/10/2012	7:48:06 PM	Helium valve closed
7/10/2012	7:48:06 PM	BCl3 valve closed
7/10/2012	7:48:06 PM	PH3 valve closed
7/10/2012	7:48:06 PM	SiCl4 pre valve closed
7/10/2012	7:48:06 PM	SiCl4 post valve closed
7/10/2012	7:48:06 PM	Main Vac valve closed
7/10/2012	7:48:06 PM	Bypass valve closed
7/10/2012	7:48:06 PM	H2 valve opened
7/10/2012	7:48:06 PM	Bubbler valve opened
7/10/2012	7:48:06 PM	Helium MFC set to  0.000000
7/10/2012	7:48:06 PM	H2 MFC set to  500.000000
7/10/2012	7:48:06 PM	BCl3 MFC set to  0.000000
7/10/2012	7:48:06 PM	PH3 MFC set to  0.000000
7/10/2012	7:48:06 PM	SiCl4 MFC set to  0.000000
7/10/2012	7:48:06 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	7:48:06 PM	Tube furnace set to 750
7/10/2012	8:03:06 PM	H2 valve closed
7/10/2012	8:03:06 PM	BCl3 valve closed
7/10/2012	8:03:06 PM	PH3 valve closed
7/10/2012	8:03:06 PM	SiCl4 pre valve closed
7/10/2012	8:03:06 PM	SiCl4 post valve closed
7/10/2012	8:03:06 PM	Main Vac valve closed
7/10/2012	8:03:06 PM	Bypass valve closed
7/10/2012	8:03:06 PM	Helium valve opened
7/10/2012	8:03:06 PM	Bubbler valve opened
7/10/2012	8:03:06 PM	Helium MFC set to  500.000000
7/10/2012	8:03:06 PM	H2 MFC set to  0.000000
7/10/2012	8:03:06 PM	BCl3 MFC set to  0.000000
7/10/2012	8:03:06 PM	PH3 MFC set to  0.000000
7/10/2012	8:03:06 PM	SiCl4 MFC set to  0.000000
7/10/2012	8:03:06 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	8:03:06 PM	Tube furnace set to 0
7/10/2012	8:23:06 PM	Helium valve closed
7/10/2012	8:23:06 PM	H2 valve closed
7/10/2012	8:23:06 PM	BCl3 valve closed
7/10/2012	8:23:06 PM	PH3 valve closed
7/10/2012	8:23:06 PM	SiCl4 pre valve closed
7/10/2012	8:23:06 PM	SiCl4 post valve closed
7/10/2012	8:23:06 PM	Main Vac valve closed
7/10/2012	8:23:06 PM	Bypass valve closed
7/10/2012	8:23:06 PM	Bubbler valve closed
7/10/2012	8:23:06 PM	Helium MFC set to  0.000000
7/10/2012	8:23:06 PM	H2 MFC set to  0.000000
7/10/2012	8:23:06 PM	BCl3 MFC set to  0.000000
7/10/2012	8:23:06 PM	PH3 MFC set to  0.000000
7/10/2012	8:23:06 PM	SiCl4 MFC set to  0.000000
7/10/2012	8:23:06 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	8:23:07 PM	Tube furnace set to 0
7/10/2012	8:43:07 PM	Helium valve closed
7/10/2012	8:43:07 PM	H2 valve closed
7/10/2012	8:43:07 PM	BCl3 valve closed
7/10/2012	8:43:07 PM	PH3 valve closed
7/10/2012	8:43:07 PM	SiCl4 pre valve closed
7/10/2012	8:43:07 PM	SiCl4 post valve closed
7/10/2012	8:43:07 PM	Main Vac valve closed
7/10/2012	8:43:07 PM	Bubbler valve closed
7/10/2012	8:43:07 PM	Bypass valve opened
7/10/2012	8:43:07 PM	Helium MFC set to  0.000000
7/10/2012	8:43:07 PM	H2 MFC set to  0.000000
7/10/2012	8:43:07 PM	BCl3 MFC set to  0.000000
7/10/2012	8:43:07 PM	PH3 MFC set to  0.000000
7/10/2012	8:43:07 PM	SiCl4 MFC set to  0.000000
7/10/2012	8:43:07 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	8:43:07 PM	Tube furnace set to 0
7/10/2012	8:43:58 PM	Helium valve closed
7/10/2012	8:43:58 PM	H2 valve closed
7/10/2012	8:43:58 PM	BCl3 valve closed
7/10/2012	8:43:58 PM	PH3 valve closed
7/10/2012	8:43:58 PM	SiCl4 pre valve closed
7/10/2012	8:43:58 PM	SiCl4 post valve closed
7/10/2012	8:43:58 PM	Main Vac valve closed
7/10/2012	8:43:58 PM	Bubbler valve closed
7/10/2012	8:43:58 PM	Bypass valve opened
7/10/2012	8:43:58 PM	Helium MFC set to  0.000000
7/10/2012	8:43:58 PM	H2 MFC set to  0.000000
7/10/2012	8:43:58 PM	BCl3 MFC set to  0.000000
7/10/2012	8:43:58 PM	PH3 MFC set to  0.000000
7/10/2012	8:43:58 PM	SiCl4 MFC set to  0.000000
7/10/2012	8:43:58 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	8:43:58 PM	Tube furnace set to 0
7/10/2012	8:44:58 PM	Helium valve closed
7/10/2012	8:44:58 PM	H2 valve closed
7/10/2012	8:44:58 PM	BCl3 valve closed
7/10/2012	8:44:58 PM	PH3 valve closed
7/10/2012	8:44:58 PM	SiCl4 pre valve closed
7/10/2012	8:44:58 PM	SiCl4 post valve closed
7/10/2012	8:44:58 PM	Bypass valve closed
7/10/2012	8:44:58 PM	Bubbler valve closed
7/10/2012	8:44:58 PM	Main Vac valve opened
7/10/2012	8:44:58 PM	Helium MFC set to  0.000000
7/10/2012	8:44:58 PM	H2 MFC set to  0.000000
7/10/2012	8:44:58 PM	BCl3 MFC set to  0.000000
7/10/2012	8:44:58 PM	PH3 MFC set to  0.000000
7/10/2012	8:44:58 PM	SiCl4 MFC set to  0.000000
7/10/2012	8:44:58 PM	Bypass solenoid MFC set to  0.000000
7/10/2012	8:44:59 PM	Tube furnace set to 0
7/10/2012	9:44:59 PM	Run finished at 9:44 PM
